{"product_id":"atomic-layer-deposition-9781118747384","title":"Atomic Layer Deposition","description":"\u003cp\u003eSince the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.\u003c\/p\u003e","brand":"Gardners","offers":[{"title":"Default Title","offer_id":53870420525335,"sku":null,"price":22899.18,"currency_code":"INR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0679\/6918\/8119\/files\/1602188.webp?v=1784062317","url":"https:\/\/payment.letskitaboo.com\/ur\/products\/atomic-layer-deposition-9781118747384","provider":"Kitaboo One eStore","version":"1.0","type":"link"}